Reflectance anisotropy spectroscopy (RAS) for in-situ identification of roughness morphologies evolving during reactive ion etching (RIE)
| Author: | Emerson Candido de OliveiraORCiD, Johannes Strassner, Christoph DoeringORCiD, Henning FouckhardtORCiD |
|---|---|
| URL: | https://www.sciencedirect.com/science/article/pii/S0169433222032974?via%3Dihub |
| DOI: | https://doi.org/10.1016/j.apsusc.2022.155769 |
| ISSN: | 1873-5584 |
| Journal: | Applied Surface Science |
| Publisher: | Elsevier |
| Document Type: | Research Article |
| Language: | English |
| Date of first Publication: | 2022/11/21 |
| Release Date: | 2023/01/03 |
| Volume: | 611 |
| Issue: | Part B |
| Article Number: | 155769 |
| Page Number: | 9 |
| First Page: | 1 |
| Last Page: | 9 |
| Faculties / Organisational entities: | RPTU in Kaiserslautern / Fachbereich Physik / Integrierte Optoelektronik und Mikrooptik |
| Open access state: | Hybrid Open-Access |
| RPTU: | Kaiserslautern |
| Research funding: | DFG |
| Created at the RPTU: | Yes |