Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems

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Author:Julian MengesORCiD, Steffen Klingel, Egbert OesterschulzeORCiD, Hans-Jörg BartORCiD
URL:https://www.mdpi.com/1424-8220/19/11/2494
DOI:https://doi.org/10.3390/s19112494
ISSN:1424-8220
Journal:Sensors
Publisher:MDPI
Document Type:Research Article
Language:English
Year of first Publication:2019
Release Date:2022/05/13
Faculties / Organisational entities:RPTU in Kaiserslautern / Fachbereich Maschinenbau und Verfahrenstechnik
Open access state:Gold Open-Access
Publication funding:DFG-Fonds
RPTU:Kaiserslautern
Research funding:DFG
Created at the RPTU:Yes