Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems
| Author: | Julian MengesORCiD, Steffen Klingel, Egbert OesterschulzeORCiD, Hans-Jörg BartORCiD |
|---|---|
| URL: | https://www.mdpi.com/1424-8220/19/11/2494 |
| DOI: | https://doi.org/10.3390/s19112494 |
| ISSN: | 1424-8220 |
| Journal: | Sensors |
| Publisher: | MDPI |
| Document Type: | Research Article |
| Language: | English |
| Year of first Publication: | 2019 |
| Release Date: | 2022/05/13 |
| Volume: | 19 |
| Issue: | 11 |
| Article Number: | 2494 |
| Page Number: | 9 |
| First Page: | 1 |
| Last Page: | 9 |
| Faculties / Organisational entities: | RPTU in Kaiserslautern / Fachbereich Maschinenbau und Verfahrenstechnik |
| Open access state: | Gold Open-Access |
| Publication funding: | DFG-Fonds |
| RPTU: | Kaiserslautern |
| Research funding: | DFG |
| Created at the RPTU: | Yes |