Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM
| Author: | Tobias Ott, Diego Roldan, Claudia Redenbach, Katja Schladitz, Michael Godehardt, Sören Höhn |
|---|---|
| URL: | https://www.j-sens-sens-syst.net/8/305/2019/ |
| DOI: | https://doi.org/10.5194/jsss-8-305-2019 |
| ISSN: | 2194-878X |
| Journal: | Journal of Sensors and Sensor Systems |
| Publisher: | Copernicus |
| Document Type: | Research Article |
| Language: | English |
| Year of first Publication: | 2019 |
| Release Date: | 2022/05/13 |
| Faculties / Organisational entities: | RPTU in Kaiserslautern / Fachbereich Mathematik |
| Open access state: | Gold Open-Access |
| RPTU: | Kaiserslautern |
| Research funding: | DFG |
| Created at the RPTU: | Yes |