Define and measure the dimensional accuracy of two-photon laser lithography based on its instrument transfer function
| Author: | Gaoliang Dai, Xiukun Hu, Julian Hering, Matthias EiflerORCiD, Jörg SeewigORCiD, Georg von FreymannORCiD |
|---|---|
| URL: | https://iopscience.iop.org/article/10.1088/2515-7647/abfaa7 |
| DOI: | https://doi.org/10.1088/2515-7647/abfaa7 |
| ISSN: | 2515-7647 |
| Journal: | Journal of Physics: Photonics |
| Publisher: | IOP |
| Document Type: | Research Article |
| Language: | English |
| Year of first Publication: | 2021 |
| Release Date: | 2022/05/13 |
| Volume: | 3 |
| Issue: | 3 |
| Article Number: | 034002 |
| Page Number: | 10 |
| First Page: | 1 |
| Last Page: | 10 |
| Faculties / Organisational entities: | RPTU in Kaiserslautern / Fachbereich Physik |
| Open access state: | Gold Open-Access |
| RPTU: | Kaiserslautern |
| Research funding: | DFG |
| Created at the RPTU: | Yes |