Lithography-free surface modification by self-masking during glass dry-etching
| Author: | Eric Hein, Dennis Fox, Henning FouckhardtORCiD |
|---|---|
| URL: | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7953/1/Broad-area-lasers-with-folded-resonator-geometry-for-integrated-transverse/10.1117/12.873378.short |
| DOI: | https://doi.org/10.1117/12.859800 |
| ISBN: | 9780819484901 |
| ISSN: | 0277-786X |
| Parent Title (English): | Nanoengineering: Fabrication, Properties, Optics, and Devices VII |
| Publisher: | SPIE |
| Place of publication: | Bellingham, Washington, USA |
| Editor: | Elizabeth A. Dobisz, Louay A. Eldada |
| Document Type: | Conference Proceeding |
| Language: | English |
| Publication year: | 2010 |
| Year of first Publication: | 2010 |
| Release Date: | 2025/06/18 |
| Volume: | 7764 |
| Page Number: | 9 |
| Faculties / Organisational entities: | RPTU in Kaiserslautern / Fachbereich Physik / Integrierte Optoelektronik und Mikrooptik |
| Open access state: | Closed Access |
| RPTU: | Kaiserslautern |
| Created at the RPTU: | Yes |